Stella original measuring system (ST series) by the CAD data match-up method Statistical process management (yield up and manufacturing of a specific product) assist system
Extends the product lineup measuring and AOI system “ST series” which is the first in the industry，such as from desktop type to large size-enabled system (for example, 810×810㎜). All components and softwares are developed and manufactured by ourselves.
What!s NEWHigh-end machine “ST-3040F/ST-2010F”with granite stage appears on the scene as new product of ST series (measuring and AOI system).
▲ST-2010F
Original Specification
①Granite stage is adopted in this machine; as a result, measuring precision is enhanced dramatically because of improvement of anti-versatility property.
②Also, cross-roller bearing is adopted for the first time in ST series.
③Resolution capability of motion-controller is 10 nm (ST-3040F) and 5 nm (ST-2010F), and that of mechanical machine is 50 nm (ST-3040F) and 20 nm (ST-2010F).
④AOI function and etching simulator function can be built in by image treatment and data-matching with GPU technology (optional).
⑤This machine is best suited for high precision photo-mask.
▲ST-800(810×810㎜ size-enabled system)
▲ST-2010F(210×210㎜ size-enabled system)
▲ST-100(100×100㎜ size-enabled system)
▲ST-7080F(700×800㎜ size-enabled system)
▲ST-750(750×750 size-enabled system)
▲ST-400(410×410 size-enabled system)
▲LST3040G
Field of ST series
The graph shows covered territory of ST series. Now, field of ST
series is limited to PCB, photo mask, screen mask, metal mask, and so on,
however, it will be spread to package substrate, high precision photo mask,
LSI, photo mask for LSI use in the future.
A reason why territory of product is spread speedy and drastically is based on two following features. One is image processing technology by original software. Another is control technology of hardware with high accuracy, for example, motion controller, moving stage by piezo driving method, laser interferometer, light intensity control of illumination, control of temperature and humidity, and so on. Furthermore, these components and technology are developed by ourselves.
Furthermore, simulator using AI will be dreveloped, and automation of various
commands will be proceeded.
Low magnification:
about 8.0㎜ x 6.4㎜ - 2.0㎜ x 1.6㎜
Standard magnification:
about 4.0㎜ x 3.2㎜
Distortion
0.05％
Illuminator
Stage, Coaxial light, Ring
Machine specification
Size (WxDxH)
1130mmx 1768mm x 1179mm
Weight
700㎏
Power supply
100 V
Electricity consumption
2 kVA
Accuracy assurance in environment
20℃±1℃
▲Basic specification of ST-600
CAD data (Gerber data) link
ST series can inspect and measure while linking with CAM system “Stella Vision for Java”. As a result, it can becomes to analyze by use of CAD data (Gerber data, DXF data, and etc.).
Measurement function
ST series has measurement function, too. It's possible to measure not only XY dimension but also Z dimension (height, thickness, and so on). Also, it's possible to measure center point and corner part based on angle, circle, figure recognition, too.
Measurement judgment function by the CAD data match-up method
This system makes it possible to compare absolute value of CAD data in measurement process. Also, you can judge admission decision if you set up acceptable level (± value) before the fact, too.
CAD data (Gerber data) feedback
It's possible to feed back calibration value into CAD data easily because it performs measurement while linking with CAM system “Stella Vision for Java”.
NC data making function (for inspection point use)
You can use ST series as NC data making system. Point information gained from this result is fed back into CAM system “Stella Vision for Java” and is output into CAD data.
Transform from original film data into quasi Gerber data function (for form of flying data use)
It's possible to capture film image and transform from its data into quasi CAD data. Therefore, it is most suitable for drawing up of Gerber data for flying probe inspection system use.
It's most suitable for analysis of finish value and ISO support
It's most suitable for ISO support and daily checking because it judges admission decision by automatic measurement program.
Statistical Process Control
It's most suitable for control process statistically. It's possible to monitor process, discover a problem, judge process quality by data collection and analysis.
Constant temperature chamber
▲Blue color shows temperature change in a clean room and pink color shows temperature change
in a constant temperature chamber.
As you know, it is necessary for precise control of temperature in system to measure with high accuracy. In short, pattern dimension displayed on PC monitor is practical value if it is measured in severe controlled environment. ST series equips a constant temperature chamber (optional) which suppresses temperature change to less than ± 0.2 ℃. It could succeed to enhance absolute measurement accuracy.
Since 1989 our company has established, we have accepted high estimate from users in PCB and photo mask industries because of innovation spirit, low cost ability, original viewpoint, practical result. We invested R&D substantially based on our slogan “Something Special”, in short, our target is different from that of other persons.
Our original technology is spread to machine design, electronics circuit design, optics design, development of IC, development of computer software. We have developed these technology by ourselves. Therefore, we can propose a novel product based on various viewpoint for our users by mass technology in the office.
ST series which is one of our products equips not only measurement function with various and multiple methods in easy operation but also drawing up function which draws up vector data from image capture and measurement result.
Software
▲Setting up sample of binarization
It operates by our CAD/CAM software “Stella Vision for JAVA”, so that, makes it possible to specify measurement area on CAD data and write output measurement result into CAD data easily. You can transform this output data into various support formats such as Gerber, DXF, and so on. Additionally, you can capture edge part of object which is difficult to capture because of low contrast by various image processing functions.
Measurement inspection command
Various measurement methods
It's supports basic measurement objects such as line width, distance between 2 or 3 points, distance between multiple line, diameter, circle, angle, and so on. It's possible to measure various points by combination use of positioning function.
Various situation functions
It has various coordinate positioning function which assists movement of measurement point.
Auto focus function
It equips image focus function. It's possible to focus various objects because of indicating sampling range and position of focus by easy mouse operation. As a result, it's possible to measure Z dimension, for example, thickness of solder, copper foil, and so on.
Output of measurement result
Measurement result is written output into CAD data, text file based on the CSV format, and a companion printer.
Automatic measurement function
In this function, you set up measurement point such as line width, diameter of hole, distance, angle based on CAD data and make up measurement data. Then, you measure based on the measurement data. Also, you can compare the measurement result and an original design data.
Off-line teaching function
It's possible to make up measurement program by teaching measurement method.
Manufacturing function of CAD data
It's possible to transform composite image into polyline data by use of patchwork function which shoots a monitoring substrate and makes a composite picture. Also, it equips figure drawing function which draws up CAD data by input of point while seeing camera image. Concretely, it's possible to draw up polyline and flash. By these function, it's possible to draw up data of a film without data.
Automatic NC data making function
This system makes it possible to capture by automatic NC data making function by combination use of CAD data drawing up function while it captures NC hole open information in a substrate.
①Scan a substrate (transparent mode)
②Draw up an automatic program by the captured data (BMP)
③Run the automatic program
④Write output into data (Gerber, NC, and etc.）after it captured
Outline of set up of automatic measurement command
It's possible to set up a measurement program in respect to CAD data.
Input data
Gerber data
DXF data
NC data
Router data
Others
Measurement program item
You choose measurement item and configure it as CAD data. In this time, you can judge admission decision in automatic measurement process by input of acceptable value.
Configure a measurement program by CAD data
Outline of automatic measurement command and measurement result
Others out line
Data correlation diagram
Road map
The above graph shows functions of ST series. In the past, main functions are three such as measurement, software AOI, and laser repair. However, we have brushed up a hardware AOI system with image processing board recently. As a result, we have succeeded to reduce inspection time drastically.
