Since 1989 our company has established, we have accepted high estimate from users in PCB and photo mask industries because of innovation spirit, low cost ability, original viewpoint, practical result. We invested R&D substantially based on our slogan gSomething Specialh, in short, our target is different from that of other persons.
Our original technology is spread to machine design, electronics circuit design, optics design, development of IC, development of computer software. We have developed these technology by ourselves. Therefore, we can propose a novel product based on various viewpoint for our users by mass technology in the office.
ST series which is one of our products equips not only measurement function with various and multiple methods in easy operation but also drawing up function which draws up vector data from image capture and measurement result.
Element Technology
A typical example is to manufacture almost components by ourselves. Concretely, we have developed XYZ stage, laser interferometer, motion controller, radiated thermometer, thermometer and hygrometer, high speed line sensor camera, automatic light control system for LED light use, and so on from the beginning.
As you know, it's necessary for this development to waste huge quantities of work and time if small and medium-sized enterprise such as Stella develops these components by ourselves. However, we have succeeded to brush up system with high accuracy and enhance usability greatly by perform of complicated work daringly.
Of course, it's easy to assemble a system by purchase of commercially-supplied components. However, in this case, it is impossible to extract more than ability compared to that of its components, in short, more than ability compared to that of general product for mass production use. Stella is not just a assemble maker. Therefore, we get attached to self-development.
Recently, its accomplishment became to appear gradually, so that, it's possible to differentiate our product from that of competitive companies. For example, in image processing concern, we have succeeded to add AOI function in addition to basic function(measurement function). This became a reality by putting image processing ability (gained by CAD/CAM system) to practical use. As a result, it became to be possible to virsion up as AOI system by installing software function only into the existing system. Of course, we are trying to develop high speed machine with image processing board against high speed processing needs.
On the other hand, we have succeeded to brush up in hardware drastically. Concretely, we have developed 5 state motor with high resolution capability such as max. 200,000 steps and high speed driving and 2 state motor with resolution capability such as 3,200 steps.
It's possible to position with high accuracy same as nm order without speed change of micro-step because it does not occur to hunting phenomenon and oscillation of hold process in positioning process. Also, we confirmed this motion controller operated until 800,000 step. Therefore, this means it's possible to move smoothly without a sound and vibration. Of course, the existing system occurs a little sound noise, but has high accuracy same as that of the above new component.
By the way, it is necessary for considering individual difference of pulse motors while micro-step number is much as the above. It's a reason why fabricated accuracy of motors is ununiformed. We are developing rotation analyzer which analyzes individual motor to find out physical phenomenon such as a stepping error.
We are going to not only brush up the motion controller but also equip 2nd stage by piezo driving stage in order to enhance measurement precision. In short, in this new method, you measure total dimension by the existing linear stage but short dimension such as fine pattern by 2nd stage. Concretely, it minimizes movement resolution capability by displacement of PZT by superimposed voltage. As a result, movement resolution capability becomes to be 0.1 nm in fact. This value is less than 1/3 compared to that of the conventional piezo driving stage. Therefore, it's possible to measure ultra-fine pattern same as 1 nm order. Of course, we will equip strain gauge in the piezo driving stage in the future in order to calibrate hysteresis phenomenon.
Additionally, it equips a temperature sensor in the stage as a solution of thermal expansion in respect to temperature change. As a result, it was possible to calibration dimension based on temperature in measurement environment. It was possible to be absolute high accuracy which was impossible in competitive products.
The above example is a small portion of various element technologies. A reason why we get attached to self-development is based on our concept gSimple is besth. We had better eliminate wasted functions as possible as if we carry out precision completely. In short, we consider precision is enhanced if components become to be purer.
Image processing function
It equips image processer board developed by ourselves and 2 channel camera link IF, forwards data speedily by high captured PCI-X interface. Then, it performs multiple image convolutions by the latest FPGA and VHDL technology. Its engine is most suitable for image comparison because it performs image treatment on-board quickly by on-board memory and dedicated controller.
In addition, this system makes it possible to capture with high speed by use of high speed line sensor camera manufactured by ourselves. Also, it can control illumination intension with respect to each area, in short, to set up detail brightness of area by EZ-NET and original circuit.
Motion control
ST series equips a motion controller manufactured by ourselves. It equips the latest control circuit with use of micro-stepping technology developed by ourselves. It' possible to remote control command in full intelligence by dedicated MPU. Also, it's possible to arrange position accuracy with nm order without speed change of micro-step.
Supports 5 state motor
It supports high resolution capability such as max. 200,000 steps and high speed driving.
200,000 step1200 rpm`40,000 step3000rpm
Supports 2 state motor
It drives resolution capability such as 3,200 steps. It's possible to drive max.5000 rpm and to control maximum 64 motors simultaneously by network association. It's most suitable for high scale factor use because it doesnft occur to hunting phenomenon and oscillation of hold process in severe positioning process.
Zoom lens
ST series makes use of a zoom lens with low distortion, low difference light intensity between surround, deep focal depth. As a result, it's possible to measure with high accuracy in case of high scale factor.
