Stella original measuring system (ST/LST series) by the CAD data match-up method
Inspection system with high cost performance “LST Series” has been released
By new structure design, we could succeed to reduce system cost
Low cost inspection system which is possible to be customized correspond to needs of field has come into existence
Feature
①Expansion of function, customization ability
It introduces original element technology which is stored for many years while keeping structure of the existing system “ST series”. It's possible to correspond to needs of field flexibly.
It's possible to prepare an inspect system correspond to needs of field flexibly by expansion of function and customization. For example, it's possible to use as a system which find out caribration value in the time of correspond to fine pattern by use of data caribration. Also, it's possible to inspect while recording data as a visual check assisted system. Of course, it's possible to operate some systems simultaneously.
②Compact, lightweight, and use any locations
LST series can be placed with use any location because it's compact and lightweight. For example, it can be placed on the desktop. Furthermore, it can be placed any place because of silent design.
Measuremnet area：500×600㎜
Division ability：0.5μm
Scale：×100 or ×400
Speed：150㎜/sec
Measurement accuracy of line width：1μm(@×400)
Work specification
Process area
290×410 mm
Maximum board size
349×473 mm
Substrate thickness
0.1 - 4.0 mm
Total precision
±0.02mm
Measuring precision
±0.01mm
Stage specification
Stroke
[XY]310×410 mm [Z]20 mm
Table Size
349×473 mm
Driving method
Stepping-motor + ball screw
Control
Closed loop by making use of linear scale
Camera specification
Camera
14 M pixels / Color CCD(4384×3288)
Scale
0.14×
Pixel size
0.01mm
Illuminator
Transmission
Machine specification
Size (WxDxH)
635×730×550 mm
Weight
40 ㎏
Power supply
AC 100 V
The latest model of LST series：LST3040G
▲LST3040G
LST4050G is a low-cost model of measuring and AOI system. It is possible to customize functions upon request of field needs.
Concretely, it is possible to measure and inspect external dimensions of device, pitch of holes, slit width, corner R, external dimensions and angle of hole, and so on.
Also, it is possible to measure hole diameter of through-hole and non through-hole for NC hole application use.
Besides, it can be set up in any place because of compact size and light weight. For example, it can be used as a desk-top machine in the desk.
In general, while measuring work is done, it is necessary to prepare a measuring program such as teaching, input of measuring point, and so on. On the other hand, in LST3040G, it is possible to auto-manufacture a measuring program corresponds to the CAD data. Therefore, preparation of measuring is not necessary. Also, it is possible to treat a set of work from preparation of data to AOI continuously, because it is operated simultaneously with our software (Router Vision).
▲Before calibration(left), after calibration(right)
Data analyzer system for etching calibration work appears on the scene
We have developed LST3040A system as an added value system of LST series, too.
It's an ultimate data analyzer for etching calibration work. In this system, first of all, a real substrate is wet-etched by making use of the CAD data (Gerber data). And then, calibration value is simulated by comparison of its etching result and the original CAD data. Customer wet-etches the substrate correspond to this feed-back result. As a result, etching treatment is optimized. Therefore, it is defined as an optimized tool for etching treatment.
Of course, in this system, it's possible to add measuring and inspection function as optional function.
▲Etching simulation
This is a first etching simulation sample. Users prepare some samples in advance.
Process flow
①Etching treatment is performed by making use of the normal data (the CAD data), to estimate etching property.
②Etching result and some simulation results are compared, so that, an optimized data is selected in accordance with its result.
③The original data (the CAD data) is calibrated automatically by feedback offset treatment which is gained in accordance with the original data and simulation data.
④Etching treatment is performed in accordance with feedback offset data, and then, its result is analyzed.
NEW PRODUCT
Stella Corporation has released new equipment LST4050AOI as reinforcement model of AOI function.
LST4050AOI
Specification
①AOI by CAD data comparison method
②Measurement and AOI by use of color CCD/area camera
③Preparation time (from reading of CAD data to start of inspection) is fast same as 5 min and under
④Correspond to various specific works, such as, the screen mask, wet etched thick Cu foil (from top angle and bottom angle)
⑤Low cost
⑥Light weight and compact size (Possible to use as a desktop machine)
Function
Recognize top plane and bottom plane by use of color CCD
It's possible to inspect component pad at top plane and bottom plane
It's possible to minimize occurrence of false defect
It's suitable for thick Cu foil
It's possible to optimize inspect in proportion as property of the work because of configuration of attribution by CAD data comparison
In general, in the wet etching process, pattern form after etching is not same as that of the original CAD data by shape change and ununiformed process. In this system, CAD data is automatically corrected in advance by calibration. As a result, false defect can be minimized.
Main object
Laser Plotter output film
NC
DFR (before and after wet etching)
Wet etched thick Cu foil
Screen Mask
Metal mask
High throughput AOI system was released for pilot-production and mass-production
Stella Corporation has released a high throughput AOI and measuring system “LST6050AOI-Twin”. Twin table is adopted in this system due to speeding up of AOI time. As a result, it's possible to correspond to pilot-production and mass-production line.
In this system, AOI and review can be efficiently done only 1 examiner. And also, not a monochrome line sensor camera but a color area sensor camera is built in. As a result, it's possible to divide into color changing, contrasting density, and top angle and bottom angle of cupper foil. Furthermore, influence of warpage of substrate can be minimized.
CAD LINK complete comparison method is adopted as an inspection algorithm. It's possible to inspect complicated shapes easily.
before etching process
after etching process
Metal mask
NC inspection
In addition, a lot of inspection objects such as before and after wet-etching, after hole making, and opening area can be corresponded.
Inspection resolution is 8μm/4μm/2μm. Of course, it's possible to not only
automatically inspect open and short defect, pinhole defect, protrusion
defect, and so on, but also, measure dimension of fine pattern automatically.
Verification system “LST6050-Verification”
Verification system “LST6050-Verification” for AOI system was released as an optional product. As a result, it's possible to operate AOI and verification effectively by 1 person.
Specification of the substrate (Single table)
Max verification range：600×500 ㎜
Max substrate size：650×550 ㎜
Max substrate thickness：5.0 ㎜
Specification of the stage
Moving range：[XY] 610×510 ㎜ [Z]15 ㎜
Table size：650×550 ㎜
Driving method：Stepping motor + belt drive
Specification of camera and lens (Single table)
Camera：CMOS color camera
Illumination：Ring illumination, Transparent illumination
Specification of software
Reading data：SBZ, Gerber 274D, X, DPF, DXF, NC, and so on.
Alignment：indicated 3 or 4 points in the data
Review function：
Specification of PC
OS：Windows10 Pro 64bit
CPU：Intel or AMD
Memory：16GB and over
HDD capacity：1TB and over
AOI for Screen Mask use
Specification
①Detection capability of protrusion and defect is high same as 1μm
②It's possible to detect exogenous material and residual of emulsion, which are adhered to screen mesh
③Detect full-covered point by screen mesh in opening area of fine pattern
④Detect fine pinhole on emulsion
⑤Detection capability is not influenced by difference of color shade and contrasting density of emulsion
⑥Easy operation by alignment free
⑦Throughput of 100 × 100㎜ size is high same as approximate 9 min (@0.7μm pixel)
⑧If twin table is built in by optional, throughput is greatly enhanced
⑨Low cost
⑩Light weight and compact size (Possible to use as a desktop machine)
