Stella original measuring system (ST/LST series) by the CAD data match-up method
ST-6050 is an AOI system for exclusive screen-mask use.
Specification
①Detection capability of protrusion and defect is high same as 1μm
②It's possible to detect exogenous material and residual of emulsion, which are adhered to screen mesh
③Detect full-covered point by screen mesh in opening area of fine pattern
④Detect fine pinhole on emulsion
⑤Detection capability is not influenced by difference of color shade and contrasting density of emulsion
⑥Easy operation by alignment free
⑦Throughput of 100 × 100㎜ size is high same as approximate 9 min (@0.7μm pixel)
⑧If twin table is built in by optional, throughput is greatly enhanced
⑨Low cost
⑩Light weight and compact size (Possible to use as a desktop machine)
