Stella original measuring system (ST/LST series) by the CAD data match-up method
Inspection system with high cost performance “LST Series” has been released
By new structure design, we could succeed to reduce system cost
Low cost inspection system which is possible to be customized correspond to needs of field has come into existence
Feature
①Expansion of function, customization ability
It introduces original element technology which is stored for many years
while keeping structure of the existing system “ST series”. It's possible
to correspond to needs of field flexibly.
Measuremnet area
500 × 600 ㎜
Division ability
0.5 μm
Scale
×100 or ×400
Speed
150 ㎜/sec
Measurement accuracy of line width
1 μm(@×400)
It's possible to prepare an inspect system correspond to needs of field
flexibly by expansion of function and customization. For example, it's
possible to use as a system which find out caribration value in the time
of correspond to fine pattern by use of data caribration. Also, it's possible
to inspect while recording data as a visual check assisted system. Of course,
it's possible to operate some systems simultaneously.
②Compact, lightweight, and use any locations
LST series can be placed with use any location because it's compact and
lightweight. For example, it can be placed on the desktop. Furthermore,
it can be placed any place because of silent design.
High throughput AOI system for pilot-production and mass-production
Stella Corporation has released a high throughput AOI and measuring system “LST6050AOI-Twin”. Twin table is adopted in this system due to speeding up of AOI time. As a result, it's possible to correspond to pilot-production and mass-production line.
In this system, AOI and review can be efficiently done only 1 examiner. And also, not a monochrome line sensor camera but a color area sensor camera is built in. As a result, it's possible to divide into color changing, contrasting density, and top angle and bottom angle of cupper foil. Furthermore, influence of warpage of substrate can be minimized.
CAD LINK complete comparison method is adopted as an inspection algorithm. It's possible to inspect complicated shapes easily.
before etching process
after etching process
Metal mask
NC inspection
In addition, a lot of inspection objects such as before and after wet-etching, after hole making, and opening area can be corresponded.
Inspection resolution is 8μm/4μm/2μm. Of course, it's possible to not only
automatically inspect open and short defect, pinhole defect, protrusion
defect, and so on, but also, measure dimension of fine pattern automatically.
