Stella original measuring system (ST/LST series) by the CAD data match-up method
High-end machine “ST-7080F”with granite stage and gantry
Stella Corporation succeeded to develop a high-end measuring & AOI
system "ST-7080F", was able to correspond 700 × 800 ㎜ substrate,
as a new product of measuring & AOI system (ST series). It's effective
for screen mask, photo mask, high-end PCB, wet-etching fabricated product,
and so on.
▲ST-7080F
▲Granite gantry
In this system, granite was adopted as not only xy stage but also column gantry, in order to minimize resistance against vibratility. In spite of stepping motor & ball screw driving, maximum precision was obtained among ST series. In fact, positioning accuracy was approximate (2＋L/250)μm. And also, setting space could be greatly reduced compared to conventional systems because of y stage and x gantry.
As regards AOI function, minimum pixel size are 170 nm, 350 nm, 700 nm,
1700 nm respectively, and minimum detected defect size are 500 nm, 1000
nm, 2000 nm, 5000nm respectively. Furthermore, 60 nm minimum pixel size
and 250nm minimum detected defect size will be gained in near future, too.
Speedy and Automatic Measuring Function by CAD data comparison
Shortening of Process Step by Automatic Preparation of Measuring Data and
Measuring
Measuring treatment in screen can be done speedily. Therefore, enormous measuring points same as a few thousands and over can be measured mere a few minutes.
Convenient function：Format of CSV output can be customized.
CSV format is output by information for table of passing status management.
Automatic Preparation of Inspection Data
Automatic Preparation of Measuring Point from the Data
Automatic Conversion of Measuring Point by Dimension Information of DXF
and DWG
In the past, a measuring program is prepared by the teaching method or
manual work based on the CAD data at spend time in general. By contrast,
it's possible to prepare a measuring program automatically by use of ST-F
series.
Convenient Function：Numbering and Drawing Function of Measuring Point
Built-in Filtering Function Subject of measuring is classified adequately by filtering function.
Analytics by Overlay
CAD data and actual image are shown at overlay state.
