Stella original measuring system (ST/LST series) by the CAD data match-up method High-end machine “ST-3020F/ST-6050F/ST7080F”with granite stage
Work specification
Measuremnet area
600 × 500 mm
Maximum board size
650 × 500 mm
Substrate thickness
50 mm and under
Stage specification
Stroke[XY]
450 × 550 mm
Stroke[Z]
50 mm
Driving method
Stepping-motor + ball screw
Control
Closed loop by making use of linear scale
Division ability
0.05 μｍ
Repeat accuracy
±0.2 μm and under (high magnification mode)
Position accuracy
(2＋L/250) μm (high magnification mode)
Camera specification
(Zoom lens)
（Micro scope）
Scale
1×-4×
2X/5X/10X/20X
Viewing field
[1×]6.5 × 4.6 mm
[2X]4.2 × 3.5 mm
Pixel size
3.2 - 0.8 μm
1.72 - 0.17 μm
Camera
5M pixels / Color CCD
5M pixels / Color CCD
Illuminator
Transmission, Coaxial light
Software specification
Minimum image unit
0.0001 mm
Measuring function
Line width, Distance between 2 points, Diameter, Radius, Angle, Automatic
measuring, and so on.
Optional function
AOI function, Preparation function of CAD data, Measuring of height, and
so on.
Camera image capture
Capture function
Output method of result
CSV format text file, Printing
Machine specification
Size (WxDxH)
1910 × 1910.3 × 1740 mm (WDH）
Weight
810 ㎏
Power supply
AC 100V (+10％－5％)
PC specification
OS
Windows7 64bit
CPU
Intel Core i7
Memory
16GB and over
HDD
750GB and over
Original Specification
▲ST-6050F
①Granite stage is adopted in this machine; as a result, measuring precision is enhanced dramatically because of improvement of anti-versatility property.
②Also, cross-roller bearing is adopted for the first time in ST series.
③Resolution capability of motion-controller is 10 nm, and that of mechanical
machine is 50 nm (ST-3020F).
④AOI function and etching simulator function can be built in by image treatment and data-matching with GPU technology (optional).
⑤This machine is best suited for high precision photo-mask.
Speedy and Automatic Measuring Function by CAD data comparison
Shortening of Process Step by Automatic Preparation of Measuring Data and
Measuring
Measuring treatment in screen can be done speedily. Therefore, enormous measuring points same as a few thousands and over can be measured mere a few minutes.
Convenient function：Format of CSV output can be customized.
CSV format is output by information for table of passing status management.
Automatic Preparation of Inspection Data
Automatic Preparation of Measuring Point from the Data
Automatic Conversion of Measuring Point by Dimension Information of DXF
and DWG
In the past, a measuring program is prepared by the teaching method or
manual work based on the CAD data at spend time in general. By contrast,
it's possible to prepare a measuring program automatically by use of ST-F
series.
Convenient Function：Numbering and Drawing Function of Measuring Point
Built-in Filtering Function Subject of measuring is classified adequately by filtering function.
Analytics by Overlay
CAD data and actual image are shown at overlay state.
