Stella original measuring system (ST/LST series) by the CAD data match-up method
Inspection system with high cost performance “LST Series” has been released
By new structure design, we could succeed to reduce system cost
Low cost inspection system which is possible to be customized correspond to needs of field has come into existence
Feature
Measuremnet area
500 × 600 ㎜
Division ability
0.5 μm
Scale
×100 or ×400
Speed
150 ㎜/sec
Measurement accuracy of line width
1 μm(@×400)
①Expansion of function, customization ability
It introduces original element technology which is stored for many years
while keeping structure of the existing system “ST series”. It's possible
to correspond to needs of field flexibly. It's possible to prepare an inspect
system correspond to needs of field flexibly by expansion of function and
customization. For example, it's possible to use as a system which find
out caribration value in the time of correspond to fine pattern by use
of data caribration. Also, it's possible to inspect while recording data
as a visual check assisted system. Of course, it's possible to operate
some systems simultaneously.
②Compact, lightweight, and use any locations
LST series can be placed with use any location because it's compact and lightweight. For example, it can be placed on the desktop. Furthermore, it can be placed any place because of silent design.
▲Before calibration(left), after calibration(right)
Data analyzer system for etching calibration work appears on the scene
We have developed LST3040A system as an added value system of LST series, too.
It's an ultimate data analyzer for etching calibration work. In this system, first of all, a real substrate is wet-etched by making use of the CAD data (Gerber data). And then, calibration value is simulated by comparison of its etching result and the original CAD data. Customer wet-etches the substrate correspond to this feed-back result. As a result, etching treatment is optimized. Therefore, it is defined as an optimized tool for etching treatment.
Of course, in this system, it's possible to add measuring and inspection function as optional function.
▲Etching simulation
This is a first etching simulation sample. Users prepare some samples in advance.
Process flow
①Etching treatment is performed by making use of the normal data (the CAD data), to estimate etching property.
②Etching result and some simulation results are compared, so that, an optimized data is selected in accordance with its result.
③The original data (the CAD data) is calibrated automatically by feedback offset treatment which is gained in accordance with the original data and simulation data.
④Etching treatment is performed in accordance with feedback offset data, and then, its result is analyzed.
