Stella original measuring system (ST/LST series) by the CAD data match-up method
Inspection system with high cost performance “LST Series” has been released
By new structure design, we could succeed to reduce system cost
Low cost inspection system which is possible to be customized correspond to needs of field has come into existence
Feature
Measuremnet area
500 × 600 ㎜
Division ability
0.5 μm
Scale
×100 or ×400
Speed
150 ㎜/sec
Measurement accuracy of line width
1 μm(@×400)
①Expansion of function, customization ability
It introduces original element technology which is stored for many years
while keeping structure of the existing system “ST series”. It's possible
to correspond to needs of field flexibly.
It's possible to prepare an inspect system correspond to needs of field flexibly by expansion of function and customization. For example, it's possible to use as a system which find out caribration value in the time of correspond to fine pattern by use of data caribration. Also, it's possible to inspect while recording data as a visual check assisted system. Of course, it's possible to operate some systems simultaneously.
②Compact, lightweight, and use any locations
LST series can be placed with use any location because it's compact and lightweight. For example, it can be placed on the desktop. Furthermore, it can be placed any place because of silent design.
LST4050AOI
Stella Corporation has released new equipment LST4050AOI as reinforcement model of AOI function.
Specification
①AOI by CAD data comparison method
②Measurement and AOI by use of color CCD/area camera
③Preparation time (from reading of CAD data to start of inspection) is fast same as 5 min and under
④Correspond to various specific works, such as, the screen mask, wet etched thick Cu foil (from top angle and bottom angle)
⑤Low cost
⑥Light weight and compact size (Possible to use as a desktop machine)
Function
Recognize top plane and bottom plane by use of color CCD
It's possible to inspect component pad at top plane and bottom plane
It's possible to minimize occurrence of false defect
It's suitable for thick Cu foil
It's possible to optimize inspect in proportion as property of the work because of configuration of attribution by CAD data comparison
In general, in the wet etching process, pattern form after etching is not same as that of the original CAD data by shape change and ununiformed process. In this system, CAD data is automatically corrected in advance by calibration. As a result, false defect can be minimized.
Main object
Laser Plotter output film
NC
DFR (before and after wet etching)
Wet etched thick Cu foil
Screen Mask
Metal mask
