Stella original measuring system (ST series) by the CAD data match-up method
Statistical process management (yield up and manufacturing of a specific product) assist system
Extends the product lineup measuring and AOI system gST seriesh which is the first in the industryCsuch as from desktop type to large size-enabled system (for example, 810~810o). All components and softwares are developed and manufactured by ourselves.



ELST-4050 (400~500o size-enabled system)



ST-2010F (210~210o size-enabled system)


ST-100 (100~100o size-enabled system)


ST-7080F (700~800o size-enabled system)


ST-750 (750~750 size-enabled system)


One Shot Inspection
(320~420 size-enabled system)

ST-400 (410~410 size-enabled system)

LST3040G

Product lineup

Product  Specification  Automatic measuring Measuring Etching simulation  Mask to Gerber Data comparison AOI
ST-F series

Multipurpose analyzer system


ST-7080F
  Granite stage is adopted; as a result, measuring precision is enhanced dramatically because of improvement of anti-versatility property. AOI function and etching simulator function can be built in by image treatment and data-matching (optional). Standard equipment
Alignment-free measuring
@ @-  Optional Optional  Optional
LST-A series
Multipurpose analyzer system
  Compact, lightweight, and use any locations Standard equipment
Alignment-free measuring
 @@-   Optional Optional
 Optional
LST-G series
Specific measuring system for measuring object, which can be observed by transmission illuminator.
Compact, lightweight, and use any locations
Measuring speed is highest among ST series.
Standard equipment
Alignment-free high speed measuring
  @@-  @@~  Optional  @@~
ST-A series

Multipurpose analyzer system
Standard model of multipurpose analyzer system. It's possible to correspond to various substrate sizes according as needs. Standard equipment
Alignment-free measuring
 @@ - Optional Optional Optional
ST-M series
2D measuring system
Standard model of 2D measuring system
Automatic measuring and 3D measuring can be built in by optional.
Optional
Alignment-free
Standard equipment
Teaching measuring
@@@~ @@Optional Optional
Stella Analyzer U System
Measuring & AOI total system
Measuring of line width and total dimension and AOI can be done as basic functions. And also, various optional functions are lined up, too. Standard equipment  - ~ ~ Optional
LST-AOI
Reinforcement model of AOI function
AOI by CAD data comparison method
Required time from reading of data to start of inspection is 5 min and under.
@@@~ Standard equipment Standard equipment @@~ Standard equipment@@
LST-AOI-Twin
Measuring and AOI system with high speed inspection
Twin table is adopted due to speeding up of AOI time.
AOI and review can be efficiently done only 1 examiner.
@@@~ Standard equipment @@@~ @@~ Standard equipment
reasonable measuring and AOI System "Bikkuri Vision
Low-cost multi system with some functions
It's a low-cost multi system with some functions such as measuring, software AOI, and verification. Measuring function in the screen, data overlay function, and verification function after measuring and inspection were installed as basic functions. ~ Standard equipment ~ ~ Standard equipment
One Shot Inspection
high speed AOI system
In this system, various patterns in the substrate is captured at 1 shot by the CCD area sensor camera (50 mega-pixel), and then, AOI is treated by original image treatment technologies. AOI time of 320 ~ 420 o substrate is mere 10 seconds. Optional ~ ~ Optional Standard equipment
LST-6050-AOI
AOI system for large screen mask
It's possible to detect exogenous material and residual of emulsion, which are adhered to screen mesh. @@@~ @@~ @@@~ @@~ Standard equipment
LST6050AOI-Verification
Optional system of AOI system
It's possible to operate AOI and verification effectively by 1 person. @@@~ @@~ @@@~ @@~ @@~


Field of ST series

  The graph shows covered territory of ST series. Now, field of ST series is limited to PCB, photo mask, screen mask, metal mask, and so on, however, it will be spread to package substrate, high precision photo mask, LSI, photo mask for LSI use in the future.

A reason why territory of product is spread speedy and drastically is based on two following features. One is image processing technology by original software. Another is control technology of hardware with high accuracy, for example, motion controller, moving stage by piezo driving method, laser interferometer, light intensity control of illumination, control of temperature and humidity, and so on. Furthermore, these components and technology are developed by ourselves.

Furthermore, simulator using AI will be dreveloped, and automation of various commands will be proceeded.

Feature

Work specification
Process area 510 o~610 o
Maximum board size 610 o~710 o
Substrate thickness 60 o
Stage specification
Stroke 550 o~ 650 o (Z: 60 o)
Division ability 0.08ʂ
Minimum display unit 0.01ʂ
Driving speed <150 o / sec
Position accuracy (3{L/250)m
Repeatability accuracy 0.8 ilens scale S~j
Camera specification
Camera 1.3M pixels / Color
Scale Zoom lens 1~` 4~
Low magnification: 40x - 160x
Standard magnification: 80x - 320x
View range Low magnification: about 8.0o x 6.4o -@2.0o x 1.6o
Standard magnification: about 4.0o x 3.2o
Distortion 0.05
Illuminator Stage, Coaxial light, Ring
Machine specification
Size (WxDxH) 1130mmx 1768mm x 1179mm
Weight 700s
Power supply 100 V
Electricity consumption 2 kVA
Accuracy assurance in environment 20}1
Basic specification of ST-600

CAD data (Gerber data) link

ST series can inspect and measure while linking with CAM system gStella Vision for Javah. As a result, it can becomes to analyze by use of CAD data (Gerber data, DXF data, and etc.).

Measurement function

ST series has measurement function, too. It's possible to measure not only XY dimension but also Z dimension (height, thickness, and so on). Also, it's possible to measure center point and corner part based on angle, circle, figure recognition, too.

Measurement judgment function by the CAD data match-up method

This system makes it possible to compare absolute value of CAD data in measurement process. Also, you can judge admission decision if you set up acceptable level (} value) before the fact, too.

CAD data (Gerber data) feedback

It's possible to feed back calibration value into CAD data easily because it performs measurement while linking with CAM system gStella Vision for Javah.

NC data making function (for inspection point use)

You can use ST series as NC data making system. Point information gained from this result is fed back into CAM system gStella Vision for Javah and is output into CAD data.

Transform from original film data into quasi Gerber data function (for form of flying data use)

It's possible to capture film image and transform from its data into quasi CAD data. Therefore, it is most suitable for drawing up of Gerber data for flying probe inspection system use.

It's most suitable for analysis of finish value and ISO support

It's most suitable for ISO support and daily checking because it judges admission decision by automatic measurement program.

Statistical Process Control

It's most suitable for control process statistically. It's possible to monitor process, discover a problem, judge process quality by data collection and analysis.

Constant temperature chamber

Blue color shows temperature change in a clean room and pink color shows temperature change
in a constant temperature chamber.

As you know, it is necessary for precise control of temperature in system to measure with high accuracy. In short, pattern dimension displayed on PC monitor is practical value if it is measured in severe controlled environment. ST series equips a constant temperature chamber (optional) which suppresses temperature change to less than } 0.2 . It could succeed to enhance absolute measurement accuracy.

Since 1989 our company has established, we have accepted high estimate from users in PCB and photo mask industries because of innovation spirit, low cost ability, original viewpoint, practical result. We invested R&D substantially based on our slogan gSomething Specialh, in short, our target is different from that of other persons.

Our original technology is spread to machine design, electronics circuit design, optics design, development of IC, development of computer software. We have developed these technology by ourselves. Therefore, we can propose a novel product based on various viewpoint for our users by mass technology in the office.

ST series which is one of our products equips not only measurement function with various and multiple methods in easy operation but also drawing up function which draws up vector data from image capture and measurement result.

Software

Setting up sample of binarization

It operates by our CAD/CAM software gStella Vision for JAVAh, so that, makes it possible to specify measurement area on CAD data and write output measurement result into CAD data easily. You can transform this output data into various support formats such as Gerber, DXF, and so on. Additionally, you can capture edge part of object which is difficult to capture because of low contrast by various image processing functions.

Measurement inspection command

Various measurement methods
It's supports basic measurement objects such as line width, distance between 2 or 3 points, distance between multiple line, diameter, circle, angle, and so on. It's possible to measure various points by combination use of positioning function.

Various situation functions
It has various coordinate positioning function which assists movement of measurement point.

Auto focus function
It equips image focus function. It's possible to focus various objects because of indicating sampling range and position of focus by easy mouse operation. As a result, it's possible to measure Z dimension, for example, thickness of solder, copper foil, and so on.

Output of measurement result
Measurement result is written output into CAD data, text file based on the CSV format, and a companion printer.

Automatic measurement function
In this function, you set up measurement point such as line width, diameter of hole, distance, angle based on CAD data and make up measurement data. Then, you measure based on the measurement data. Also, you can compare the measurement result and an original design data.

Off-line teaching function
It's possible to make up measurement program by teaching measurement method.

Manufacturing function of CAD data
It's possible to transform composite image into polyline data by use of patchwork function which shoots a monitoring substrate and makes a composite picture. Also, it equips figure drawing function which draws up CAD data by input of point while seeing camera image. Concretely, it's possible to draw up polyline and flash. By these function, it's possible to draw up data of a film without data.

Automatic NC data making function
This system makes it possible to capture by automatic NC data making function by combination use of CAD data drawing up function while it captures NC hole open information in a substrate.
@Scan a substrate (transparent mode)
ADraw up an automatic program by the captured data (BMP)
BRun the automatic program
CWrite output into data (Gerber, NC, and etc.jafter it captured

Outline of set up of automatic measurement command

It's possible to set up a measurement program in respect to CAD data.

Input data
Gerber data
DXF data
NC data
Router data
Others

Measurement program item

You choose measurement item and configure it as CAD data. In this time, you can judge admission decision in automatic measurement process by input of acceptable value.

Configure a measurement program by CAD data

Outline of automatic measurement command and measurement result


Others out line
Data correlation diagram

Road map


The above graph shows functions of ST series. In the past, main functions are three such as measurement, software AOI, and laser repair. However, we have brushed up a hardware AOI system with image processing board recently. As a result, we have succeeded to reduce inspection time drastically.

Stella Corporation Co., Ltd.
1-1544-7 Kaijincho Minami, Funabashi, Chiba, Japan Zip: 273-0024
Tel: +81-(0)47-432-5031
Fax: +81-(0)47-432-5032
e-Mail support@stellacorp.co.jp
https://www.stellacorp.co.jp