Stella original measuring system (ST/LST series) by the CAD data match-up method
Inspection system with high cost performance gLST Seriesh has been released
By new structure design, we could succeed to reduce system cost
Low cost inspection system which is possible to be customized correspond to needs of field has come into existence
Feature
‡@Expansion of function, customization ability
It introduces original element technology which is stored for many years while keeping structure of the existing system gST seriesh. It's possible to correspond to needs of field flexibly.
It's possible to prepare an inspect system correspond to needs of field flexibly by expansion of function and customization. For example, it's possible to use as a system which find out caribration value in the time of correspond to fine pattern by use of data caribration. Also, it's possible to inspect while recording data as a visual check assisted system. Of course, it's possible to operate some systems simultaneously.
‡ACompact, lightweight, and use any locations
LST series can be placed with use any location because it's compact and lightweight. For example, it can be placed on the desktop. Furthermore, it can be placed any place because of silent design.
Measuremnet areaF500~600‡o
Division abilityF0.5ƒÊm
ScaleF~100 or ~400
SpeedF150‡o/sec
Measurement accuracy of line widthF1ƒÊm(@~400)
AOI for Screen Mask use
Specification
‡@Detection capability of protrusion and defect is high same as 1ƒÊm
‡AIt's possible to detect exogenous material and residual of emulsion, which are adhered to screen mesh
‡BDetect full-covered point by screen mesh in opening area of fine pattern
‡CDetect fine pinhole on emulsion
‡DDetection capability is not influenced by difference of color shade and contrasting density of emulsion
‡EEasy operation by alignment free
‡FThroughput of 100 ~ 100‡o size is high same as approximate 9 min (@0.7ƒÊm pixel)
‡GIf twin table is built in by optional, throughput is greatly enhanced
‡HLow cost
‡ILight weight and compact size (Possible to use as a desktop machine)