Development of AOI system with AI Function for the screen mask (2019.6)
Stella Corporation succeeded to develop an AOI system with AI (Artificial Intelligence) function. It's possible to enhance inspection accuracy by learning judgement result automatically using AI function in this system. First of all, the company will adopt this function as AOI system for the screen mask.
▲Flow of AI learning
In this system, firstly, the substrate is inspected automatically. As a result, inspection result is displayed on the PC monitor. The next, sort of detected defects is categorized, such as, foreign particle, remained emulsion, and misinformation (quasi-defect), by AI function. An operator confirms this judgement, and then, judges whether or not AI judgement is correct. AI function is improved continuously by accumulation of this review result as the database.
Of course, misinformation occurs inevitably in AOI system. However, it can be minimized in this system, as a result, duty of operator can be reduced. Furthermore, sensual inspection with human sense is expected to be realized in the future by repeated learning.