STELLA developed an original manipulator with motion control technology (Feb 2023)
Stella Corporation succeeded to develop an original manipulator with original moving control function. It's effective for deburring and elimination of particle of metal mask, and so on.
In this system, W needle with high hardness is used. Treatment such as deburring and cleaning is done by contacting this needle to a substrate. Its diameter is 1 - 10 μm. Highly physical strength was obtained by file processing of its surface. And also, adhered oil and particle on the needle can be eliminated and suppressed reattachment by original recovery unit.
Furthermore, it's possible to automatically work by some operation modes. Concretely, in case of circle mode, the needle is scratched at tracing circle shape, in case of scratch mode, it's scratched at skew round trip movement, and in case of arc mode, it's operated at tracing arc shape. As you know, in the existing manipulator, one direction only is basically operated. On the other hand, in our system, above operation modes are realized by original motion control technology, which is adopted with the measuring and AOI system "ST series".
By the way, picture 2 shows test image using metal mask sample.